Advanced Ultrasound in Diagnosis and Therapy ›› 2020, Vol. 4 ›› Issue (4): 379-382.

• Technical Papers • Previous Articles     Next Articles

Development of 4G CMUT (CMUT Linear SML44 probe)

Tsuyoshi Otakea, Hiroki Tanakab, Akifumi Sakoa, Makoto Fukadaa, Kengo Imagawaa, Masahiro Satoa   

  1. a Engineering R&D Division 1, Diagnostic R&D Division, Hitachi, Ltd. Healthcare Business Unit
    b Center for Technology Innovation, R&D Group, Hitachi, Ltd
  • Online:2020-12-30 Published:2020-09-29


In 2009, Hitachi commercialized “Mappie*1, the world’s first Capacitive Micro-machined Ultrasound Transducer (CMUT) using semiconductor based technology. It generated high quality diagnostic images of mammary glands, thanks to its broad-band characteristics[1]. This year, the 4th generation CMUT (4G CMUT) “SML44” has been brought to the market, achieved using advanced design and precise control of the fabrication process. When combined with new imaging technologies avail-able with the ARIETTA*2 850, the SML44, in addition to excellent image quality, offers commonly used modalities and func- tions such as Tissue Harmonic Imaging (THI), Color Flow Mapping (CFM), Real-time Tissue Elastography*3 (RTE), and Real-time Virtual Sonography*4 (RVS). This report introduces the latest technology adopted in the 4G CMUT design.

Key words: 4G CMUT; MEMS; High-power cell; True pulse shaping