Abstract:

In 2009, Hitachi commercialized “Mappie^*1, the world’s first Capacitive Micro-machined Ultrasound Transducer (CMUT) using semiconductor based technology. It generated high quality diagnostic images of mammary glands, thanks to its broad-band characteristics^[1]. This year, the 4^th generation CMUT (4G CMUT) “SML44” has been brought to the market, achieved using advanced design and precise control of the fabrication process. When combined with new imaging technologies avail-able with the ARIETTA^*2 850, the SML44, in addition to excellent image quality, offers commonly used modalities and func- tions such as Tissue Harmonic Imaging (THI), Color Flow Mapping (CFM), Real-time Tissue Elastography^*3 (RTE), and Real-time Virtual Sonography^*4 (RVS). This report introduces the latest technology adopted in the 4G CMUT design.

Key words: 4G CMUT; MEMS; High-power cell; True pulse shaping